Fabrication Capability Innovative Micro Technology

Company Background MEMtronics’ manufacturing partner, Innovative Micro Technology, is a leading MEMS manufacturer with a diversified range of projects and products. IMT’s 30,000 sq ft fabrication facility is the largest and best equipped independent MEMS fab in the world. Capabilities include design for manufacturability, extensive prototyping, high-volume manufacturing experience, 6" wafer efficiency, sub-micron photolithography, non-CMOS materials flexibility (metals, magnetics, etc), and unmatched metrology tools and experience. Metrology capabilities for process feedback, quality monitoring and failure analysis include four SEMS (including dual-beam SEM/FIB for failure analysis), atomic force microscopy, TEM with EDX, XRF, profilers and numerous other tools. IMT also offers various types of wafer bonding for wafer-level encapsulation and a variety of accelerated environmental testing stations, including temperature, shock and humidity testing. IMT has been operating since January 2000, and has amassed intellectual property and know-how in several key diversified MEMS industrial areas including biomedical, biotechnology, wireless communications, relay arrays, microfluidics, inertial navigation and optical telecommunications. IMT's key capabilities include: 30,000 sq. ft. Class 100, fully automated clean room fab High-resolution sub-micron photolithography Deep reactive ion etching capability High-volume, 6" wafer, manufacturing process experience Extensive non-CMOS materials flexibility (metals, magnetics, etc. in deposition, etch/plating).