U.S. Patent 6,608,268, issued August 19, 2003.
Abstract: A proximity micro-electro-mechanical system (MEMS) utilizing a gaseous capacitive gap between two conductive members. The gaseous gap is maintained by insulating structures that prevent the two conductive members from shorting. Once actuated, the gaseous gap allows high-frequency signals to be transmitted between the two conductive members of a switch. Implementation of “air-gap” switches improves reliability by eliminating dielectric charging.
Low Temperature Wafer-Level Micro-Encapsulation
U.S. Patent pending.
Abstract: A method and apparatus are provided for encapsulated micro-devices. More particularly, Microelectromechanical Systems (MEMS) switches are encapsulated. The method and apparatus involve the creation of a cage structure over the micro-devices and the application of a low-temperature liquid protective material onto the cage and subsequent curing to form a hermetic micro-encapsulation. The technique and devices employ the use of conventional semiconductor manufacturing equipment that greatly increase productivity and reduces costs over more conventional techniques and devices for protect similar micro-devices.
Membrane switch components and designs
U.S. Patent 7,498,911, issued March 3, 2009.
Abstract: The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.
Tunable cavity filters using electronically connectable pieces
U.S. Patent 7,456,711, issued November 25, 2008.
Abstract: An apparatus and a method are provided for electronically tuning cavity filters. A tunable cavity comprises at least two pieces of material, such as metal plates or metal traces, and MEMS circuitry interconnecting the pieces of material. Multiple tunable cavities can be combined to create a tunable cavity filter. The MEMS circuitry can be controlled to connect or disconnect the pieces of material, which alters the electric and magnetic fields inside the cavities. By altering the electric and magnetic fields within the cavities, the resonant frequency of the cavity filter can be tuned.
Method and apparatus for altering phase shift along a transmission line section
U.S. Patent pending.
Abstract: A new technique is presented that allows for controlling the phase of a propagating signal by selectively switching in and out relatively small perturbations along a transmission line section that provide slightly different physical paths for the currents to follow. By using relatively minor perturbations, the phase of a transmission line section can be controlled without drastically altering the impedance of the section, thereby maintaining good impedance matching properties. Also, by keeping the alternate current paths small, generally fine control of phase shift is possible along with allowing the design to remain relatively simple. Such tunable elements can then be incorporated in designs where resonators (or other elements) are separated by specific phase lengths to construct other signal processing functions, such as filters.
RF-MEMS Capacitive Switches With High Reliability
U.S. Patent pending. Patent Application 20120193685.
Abstract: A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
Electrostatic MEMS Devices With High Reliability
U.S. Patent pending.
Abstract: The present invention provides for an electrostatic microelectromechanical (MEMS) device comprised of two conductors. The first conductor is moveable towards the second conductor when a voltage is applied to the MEMS device. The device recovers from dielectric charging almost immediately upon removal of the voltage from the MEMS device.