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This is a selected bibliography of journal and conference papers published by MEMtronics' authors.  (This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author’s copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.)

RF MEMS Capacitive Switches

Charles L. Goldsmith, Tsen-Hwang Lin, Bill Powers, Wen-Rong Wu, and Bill Norvell, "Micromechanical Membrane Switches for Microwave Applications," IEEE Microwave Theory Tech. Symp. Dig., pp.91-94, May 1995.

C. Goldsmith, J. Randall, T.H. Lin, S. Eshelman, D. Denniston, S. Chen, and B. Norvell, “Characteristics of Micromachined Switches at Microwave Frequencies,” IEEE Microwave Theory Tech. Symp. Dig., pp. 1141-1144, June 1996.

Charles L. Goldsmith, Zhimin Yao, Susan Eshelman, and David Denniston, "Performance of Low-Loss RF MEMS Capacitive Switches," IEEE Microwave and Guided Wave Lett, vol. 8, no. 8, pp. 269-271, Aug. 1998.

Z.J. Yao, S. Chen, S. Eshelman, D. Denniston, and C. Goldsmith, "Micromachined low-loss microwave switches," Journal of Microelectromechanical Systems, vol. 8, no. 2, pp. 129-134, June 1999.

C.L. Goldsmith and D.I. Forehand, “Temperature Variation of Actuation Voltage in Capacitive MEMS Switches,” IEEE Microwave Wireless Comp Lett, vol. 15, no. 10, pp. 718-720, Oct. 2005.

C. Palego, S. Hadler, B. Baloglu, Z. Peng, J.C.M. Hwang, H. Nied, D. Forehand, and C. Goldsmith, "Microwave Intermodulation Technique for Monitoring the Mechanical Stress in RF MEMS Capacitive Switches," 2008 IEEE Intl Microwave Symp. Dig., pp. 29-32, June 2008.

S. Halder, C. Palego, Z. Peng, J. Hwang, D. Forehand, and C. Goldsmith, "Compact RF Model for Transient Characteristics of MEMS Capacitive Switches," IEEE Trans Microwave Theory Tech, vol. 57, no. 1, pp. 237-242, Jan 2009.

C. Goldsmith, D. Forehand, D. Scarbrough, I. Johnston, S. Sampath, A. Datta, Z. Peng, C. Palego, and J.C.M. Hwang, "Performance of Molybdenum as a Mechanical Membrane for RF MEMS Switches," 2009 IEEE Intl Microwave Symp Dig., pp. 1229-1232, June 2009.

 

C. Palego, J. Deng, S. Halder, Z. Peng, J.C.M. Hwang, C. Forehand, and C. Goldsmith, "Pulse RF Operation of MEMS Capacitive Switches," 2009 European Microwave Conference, pp. 395-398, Sept. 2009.

 

C. Palego, J. Deng, Z. Peng, S. Halder, J.C.M. Hwang, D. Forehand, D. Scarbrough, C. Goldsmith, I. Johnston, S. Sampath, and A. Datta, "Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes," IEEE Trans Microwave Theory Tech., vol. 57, no. 12, pp. 3262-3269, Dec. 2009.

S. Halder, C. Palego, J.C.M. Hwang, and C.L. Goldsmith, “Compact RF Large-Signal Model for MEMS Capacitive Switches,” 2010 IEEE Intl Microwave Symp Dig., pp. 421-424, May 2010.

G. Ding, W. Wang, S. Halder, C. Palego, D. Molinero, J.C.M. Hwang, and C.L. Goldsmith, “Intelligent CMOS control of RF MEMS capacitive switches,” 2012 IEEE International Microwave Symposium, pp. 1-3, 2012.

 

C. Palego, D. Molinero, Y. Ning, X. Luo, J.C.M. Hwang, and C. Goldsmith, “Pull-in and release transients of MEMS capacitive switches under high RF power,” 2012 7th Euro Microwave Integrated Circuits Conf (EuMIC), pp. 437-440, 2012.

 

G. Ding, D. Molinero, W. Wang, C. Palego, J.C.M. Hwang, and C.L. Goldsmith, “Intelligent Bipolar Control of MEMS Capacitive Switches,” IEEE Trans. Microwave Theory Tech, vol. 61, no. 1, pp. 464-471, 2013.

MEMS Phase Shifters
 
A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. L. Goldsmith, "X-band RF MEMS phase shifters for phased array applications," IEEE Microwave and Guided Wave Lett, Vol. 9, no. 12, pp. 517-519, Dec. 1999.

B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, "Ka-band RF MEMS phase shifters," IEEE Microwave and Guided Wave Lett, vol. 9, no. 12, pp. 520-522, Dec. 1999.

B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, C. Goldsmith, "Ka-band RF MEMS phase shifters for phased array applications," 2000 IEEE Radio Frequency Integrated Circuits Symposium, Digest of Papers, pp. 195-199, June 2000.

Joseph S. Hayden, Andrew Malczewski, Jennifer Kleber, Charles L. Goldsmith, and Gabriel M. Rebeiz, “2 and 4-Bit DC-18 GHz Microstrip MEMS Distributed Phase Shifters,” 2000 IEEE International Microwave Symposium, vol. 1, pp. 219-222, May 2001.

C. Nordquist, C. Dyck, G. Kraus, I. Reines, C. Goldsmith, W. Cowan, T. Plut, F. Austin, P. Finnegan, M. Ballance, and C. Sullivan, "A DC to 10-GHz 6-b RF MEMS Time Delay Circuit," IEEE Microw. Wireless Compon. Lett., vol. 16, no. 5, pp. 305-307, May 2006.

C. Palego, Z. Peng, J.C.M. Hwang, D. Scarbrough, D. Forehand, and C. Goldsmith, "Compact Ka-band phase shifters using MEMS capacitive switches," 2009 European Microwave Conference, pp. 1864-1867, Sept. 2009.

J. C. M. Hwang, and C. L. Goldsmith, “Robust RF MEMS switches and phase shifters for aerospace applications,” Proc. IEEE Int. Symp. Radio-Frequency Integration Technology Symp., pp. 245-248, Dec. 2009.

MEMS Tunable Filters

Charles L. Goldsmith, Andrew Malczewski, Zhimin J. Yao, Shea Chen, John Ehmke, and David H. Hinzel, "RF MEMS Variable Capacitors for Tunable Filters," Int. J. of RF and Microwave CAE, vol.9, no.4, pp. 362-374, July 1999.

J. Brank, Z. J. Yao, M. Eberly, A. Malczewski, K. Varian, and C. L. Goldsmith, "RF MEMS-Based Tunable Filters,” Int. J. of RF and Microwave CAE, vol. 11, no. 5, pp. 276-284, Sept. 2001.

C.D. Nordquist, A. Muyshondt, M.V. Pack, P.S. Finnegan, C.W. Dyck, I.C. Reines, G.M. Kraus, T.A. Plut, G.R. Sloan, C.L. Goldsmith, and C.T. Sullivan, “An X-band to Ku-Band RF MEMS Switched Coplanar Strip Filter,” IEEE Microwave and Wireless Components Letters, vol. 14, no. 9, pp. 425-427, Sept 2004.

G.M. Kraus, C.L. Goldsmith, C.D. Nordquist, C.W. Dyck, P.S. Finnegan, F. Austin IV, A. Muyshondt, and C.T. Sullivan, “A Widely Tunable RF MEMS End-coupled Filter,” 2004 IEEE International Microwave Symposium, pp. 429-432, June 2004.

C.D. Nordquist, C.L. Goldsmith, C.W. Dyck, G.M. Kraus, P.S. Finnegan, F. Austin IV and C.T. Sullivan, “X-band RF MEMS tuned combline filter,” Electronics Letters, Vol. 41, No. 2, pp. 76-77, 20 January 2005.

I.C. Reines, C.L. Goldsmith, C.D. Nordquist, C.W. Dyck, G.M. Kraus, T.A. Plut, P.S. Finnegan, F. Austin IV, and C.T. Sullivan, “A low loss RF MEMS Ku-band integrated switched filter bank,” IEEE Microwave and Wireless Components Letters, vol. 15, no. 2, pp. 74-76, Feb. 2005.

D. Scarbrough, C. Goldsmith, J. Papapolymerou, and Y. Li, "Miniature Microwave RF MEMS Tunable Waveguide Filter," 2009 European Microwave Conference, pp. 1860-1863, Sept. 2009.

RF MEMS Reliability
 
C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime Characterization Of Capacitive RF MEMS Switches," 2001 IEEE International Microwave Symposium, vol. 1, pp. 227-230, May 2001.

B. Pillans, J. Kleber, C. Goldsmith, and M. Eberly, “RF Power Handling of Capacitive RF MEMS Devices,” 2002 IEEE International Microwave Symposium, vol. 1, pp. 329-332, June 2002.

J.B. Lee and C. L. Goldsmith,“Numerical Simulations of Novel Constant-Charge Biasing Method for Capacitive RF MEMS Switch” , Proceedings of NanoTech 2003 Conf: Modeling and Simulation of Microsystems, pp. 396-399, San Francisco, CA, Feb. 2003.

Xiaobin Yuan, Sergey Cherepko, James Hwang, Charles L. Goldsmith, Christopher Nordquist, and Christopher Dyck, “Initial Observation and Analysis of Dielectric-Charging Effects on RF MEMS Capacitive Switches,” 2004 IEEE International Microwave Symposium, pp. 1943-1946, June 2004.

Xiaobin Yuan, James C. M. Hwang, David Forehand, and Charles L. Goldsmith, “Modeling and Characterization of Dielectric-Charging Effects in RF MEMS Capacitive Switches,” 2005 IEEE International Microwave Symposium, paper WE3B-3, June 2005.

C. Goldsmith, D. Forehand, XB Yuan, and J. Hwang, "Tailoring Capacitive Switch Technology for Reliable Operation," 2006 Govt Microcircuit Applications and Critical Tech Conf, paper 2.01, pp. 1-4, San Diego, CA, Mar. 2006.

Xiaobin Yuan, Zhen Peng, James C. M. Hwang, David Forehand, and Charles L. Goldsmith, “Temperature Acceleration of Dielectric Charging of RF MEMS Capacitive Switches,” 2006 IEEE International Microwave Symposium, paper TU1B-5, June 2006.

X.B. Yuan, Z. Peng, J.C.M. Hwang, D. Forehand, C.L. Goldsmith, “A transient SPICE model for dielectric-charging effects in RF MEMS capacitive switches,” IEEE Trans Electr Dev, Vol. 53, No. 10, pp. 2640-2648, Oct. 2006.

X.B. Yuan, Z. Peng, J.C.M. Hwang, D. Forehand, C.L. Goldsmith, “Acceleration of Dielectric Charging in RF MEMS Capacitive Switches, “ IEEE Trans Dev and Mat Reliability, Vol. 6, No. 4, pp. 556-563, Dec. 2006.

 

Z. Peng, X.B. Yuan, J.C.M. Hwang, D. Forehand, and C.L. Goldsmith, "Top vs. Bottom Charging of the Dielectric in RF MEMS Capacitive Switches", Proc. 2006 Asia-Pacific Microw. Conf., pp. 1535-1539, Dec. 2006.

 

Z. Peng, X.B. Yuan, J.C.M. Hwang, D.I. Forehand, C.L. Goldsmith, “Dielectric Charging of RF MEMS Capacitive Switches under Bipolar Control-Voltage Waveforms,“ 2007 IEEE Intl Microwave Symp Dig., pp. 1817-1820, June 2007.

 

C.L. Goldsmith, D.I. Forehand, Z. Peng, J.C.M. Hwang, J.L. Ebel, “High-Cycle Life Testing of RF MEMS Switches,” 2007 IEEE Intl Microwave Symp Dig., pp. 1805-1808, June 2007.

 

Z. Peng, X.B. Yuan, J.C.M. Hwang, D.I. Forehand, and C.L. Goldsmith, “Superposition Model for Dielectric Charging of RF MEMS Capacitive Switches Under Bipolar Control-Voltage Waveforms,” IEEE Trans. Microwave Theory Tech., vol. 55, no. 12, pp. 2911-2918, Dec. 2007.

 

C.L. Goldsmith, D. Forehand, D. Scarbrough, Z. Peng, C. Palego, J.C.M. Hwang, and J. Clevenger, "Understanding and improving longevity in RF MEMS capacitive switches," Proc. Int. Soc. Optical Engineering, vol. 6884, no. 03, Feb 2008.

 

Z. Peng, C. Palego, J.C.M. Hwang, D. Forehand, C. Goldsmith, C. Moody, A. Malczewski, B. Pillans, R. Daigler, and J. Papapolymerou, "Impact of Humidity on Dielectric Charging in RF MEMS Capacitive Switches," IEEE Microwave Wireless Comp. Lett., vol. 19, no. 5, pp. 299-301, May 2009.

 

Z. Peng, C. Palego, J.C.M. Hwang, C. Moody, A. Malczewski, B. Pillans, D. Forehand, and C. Goldsmith, “Effect of Packaging on Dielectric Charging in RF MEMS Capacitive Switches,” 2009 IEEE Intl Microwave Symp Dig., pp. 1637-1640, June 2009.

 

G. Papaioannou, N. Tavasolian, C. Goldsmith, J. Papapolymerou, "Dielectric Charging and Thermally Activated Processes in MEMS Capacitive Switches," 2009 European Microwave Conference, pp. 1752-1755, Sept. 2009.

C. Goldsmith, A. Sumant, O. Auciello, J. Carlisle, H. Zeng, J.C.M. Hwang, C. Palego, W. Wang, R. Carpick, V.P. Adiga, A. Datta, C. Gudeman, S. O’Brien, and S. Sampath, “Charging Characteristics of Ultra-Nano-Crystalline Diamond in RF MEMS Capacitive Switches,” 2010 IEEE Intl Microwave Symp Dig., pp. 1246-1249, May 2010.

C.L. Goldsmith, S. O'Brien, D. Molinero, and J.C.M. Hwang, “Evaluating and predicting lifetime in capacitive MEMS switches,” Intl Jour of Microwave and Wireless Technologies, vol.3, no. 5, pp. 565-570, Oct. 2011. (Copyright © Cambridge University Press and the European Microwave Assn.)

C.L. Goldsmith, J.C.M. Hwang, C. Gudeman, O. Auciello, J.K. Ebel, and H.S. Newman, “Robustness of RF MEMS capacitive switches in Harsh Environments,” 2012 IEEE International Microwave Symposium, pp. 1-3, 2012.

 

D. Molinero, X. Luo, C. Shen, C. Palego, J.C.M. Hwang, and C.L. Goldsmith, “Long-term RF Burn-in Effects on Dielectric Charging of MEMS Capacitive Switches,” IEEE Trans Device and Materials Reliability, vol. 13, no. 1, pp. 310-315, 2013.

 

RF MEMS Packaging

D. I. Forehand and C. L. Goldsmith, “Wafer Level micro-Encapsulation,” 2005 Govt Microcircuit Applications and Critical Tech Conf, paper 18.2, pp. 320-323, Las Vegas, NV, Apr. 2005.

David I. Forehand and Charles L. Goldsmith, Wafer Level Micropackaging for RF MEMS Switches,” 2005 ASME InterPACK ‘05 Tech Conf, San Francisco, CA, July 2005.

D.I. Forehand and C.L. Goldsmith, "Zero-Level Packaging for RF MEMS Switches," 2006 Govt Microcircuit Applications and Critical Tech Conf, paper 4.03, pp. 36-39, San Diego, CA, Mar. 2006.

Related Topics

O. Azucena, J. Kubby, D. Scarbrough, and C. Goldsmith, "Inkjet Printing of Passive Microwave Circuitry," 2008 IEEE Intl Microwave Symp. Dig., pp. 1075-1078, June 2008.

NEW! D. Scarbrough and C. Goldsmith, "Lightweight Filter Technology for UAV and Satellite Applications," GOMACTech 2013, pp. 599-602, Mar. 2013.

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